The Pacific Nanotechnology AFM reference, #P-000-0004-0, is helpful for establishing the performance of AFM scanners as well as optical microscopes. The patterns in the reference are made in a silicon nitride film that is deposited on a silicon substrate. This combination gives optimal color contrast when viewed with an optical microscope. Figure 1 is a picture of the AFM reference viewed in an optical microscope.
Each reference standard is shipped in a plastic "GelPac" box. With dimensions of 14x14 mm, the reference can be easily used in most commercial atomic force microscopes. Figure 2 is a picture of the reference in its plastic shipping container.
The patterns on the reference for AFM measurements are a series of squares that are located in 10 separate locations. The optical reference is made from a series of lines. There are two sets of lines that are perpendicular. Figure 3 shows a diagram of the reference pattern.
Notes: 1. SiN on Silicon. 2. Feature height: nominal 75 nm. 3. Feature width +/- 0.1 microns. 4. The “box” patterns are labeled A1, A2, A3, A4, A5 across the first row, B1, B2, B3, B4, B5 across the second row and C1, C2, C3, C4, C5 across the third row. |
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