AFM reference

The Pacific Nanotechnology AFM reference*, model P/N #P-000-0004-0 (order here from our PNI probe store), is helpful for establishing the performance of AFM scanners as well as optical microscopes. The patterns in the reference are made of silicon oxide etched in silicon.  Below is a picture of the AFM reference viewed in an optical microscope.

Each reference is shipped in a plastic "GelPac" box. With dimensions of 14 × 14 mm the reference can be easily used in most commercial atomic force microscopes. Below is a picture of the reference in its plastic shipping container.

The patterns on the reference for AFM measurements are a series of squares that are located in 10 separate locations. The optical reference is made from a series of lines. There are two sets of lines that are perpendicular. Below is a diagram of the reference pattern.

Note:

1. SiO feature etched in Si.
2. Feature height: nominal 75 nm
3. Feature width +/- 0.075 microns
4. The "box" patterns are labeled A1, A2, 3, A4, A5 across the first row, B1, B2, B3, B4, B5 across the second row and C1, C2, C3, C4, C5 across the third row.

This sample is only a reference and can be used for assuring the repeatability of an AFM or optical microscope. Absolute calibration requires a standard sample; available at www.probestore.com.