The Crystal Scanner™ is an option for the Pacific Nanotechnology Nano-R™ and Nano-I™ Stages. With the Crystal Scanner™, imaging nanostructures does not require an expert in the field of scanning probe microscopy. At the core of the Crystal Scanner™ is a new type of force sensor that does not require a complex alignment procedure. It is capable of nanostructure visualization and metrology applications.
With the Nano-R™ or Nano-I™, fitted with a Crystal Scanner™ and Crystal Scan software, engineers and scientists do not have to wait to get the nanoscale images that they require. They can directly measure the images themselves. Companies and research institutions do not have to hire an AFM expert so it costs much less to conduct nanotechnology research, development, and process control.
The Crystal Scanner™ incorporates substantial new developments in the areas of nanonewton force measurements. A Crystal Scanner™, in combination with the stage and software automation in the Nano-R™, creates a new generation of user friendly nanoscale imaging instrumentation. Specifically, the Nano-R™, in combination with our Point & Scan™ technology, provides great simplicity of operation.
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Point & Scan™ technology greatly reduces the complexity of the traditional system software, and follows the instructions on the computer screen. After only a few steps, an operator is actually seeing an image appear on a computer screen.
Point & Scan™ technology uses a standard procedure for doing the primary steps that are necessary for measuring nanoscale images. The steps are:
1) Select the sample type for imaging.
2) Place the sample in the microscope.
3) Replace the crystal sensor if necessary.
4) Locate the region on the sample for scanning.
5) Measure an image.
This same procedure is followed for measuring technical samples such as DVD bits and semiconductor device structures as well as for measuring high-resolution images of nanostructures such as nanotubes, nanoparticles and nanocrystals.
Point & Scan™ technology is possible because of advances in three fields; the crystal sensor, stage automation, and advanced software.
The force sensor in the Crystal Scanner™ is a small crystal oscillator that has a sharp probe mounted at the end of the crystal. When the probe approaches a surface, the oscillations of the probe are dampened. The amount of dampening is dependent on the force between probe and sample.
Software is used to optimize the oscillation frequency and the amount of force between the probe and sample while scanning. No mechanical adjustments are required for the crystal sensor used in the Crystal Scanner™.
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Precise and accurate measurements are assured with the advanced flexure piezo-scanner design used for moving the probe in the Nano-R™ Crystal Scanner™. With the flexure, minimal crosstalk is measured between the X-Y-Z axes and images show little to no background bow.
External calibration sensors in the X, Y, and Z axes of the Crystal Scanner™ are used to monitor the motion of the flexure scanner. Such sensors are essential for linearizing and calibrating the scanner in the X , Y, and Z axes. These sensors are essential for point and place measurements and for applications where zooming in on a specific feature in an image is required.
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Crystal Scan™ Software (CSS) greatly simplifies the operation of the Nano-R™ Crystal Scanner™. After launching the CSS, an operator has to select the type of sample that will be imaged from a menu. Information about the sample type stored in the computer is retrieved and then used for all aspects of measuring an image. For example, the CSS uses information already stored in the computer for setting the scan parameters. The CSS software in combination with the stage automation is a very powerful combination. As an example, when the CSS software is launched, the sample stage is moved to a position that is optimal for placing the sample into the microscope. The CSS also places the video optics in the optimal position for locating surface features after a sample is placed in the microscope.
Operators of the microscope have to change samples and probes. To simplify the operation of the Nano-R™ with the Crystal Scanner™, there are several videos integrated in CSS. These videos illustrate how to change a probe and place a sample into the microscope.
Advanced algorithms in the CSS software are used for establishing the quality of a probe in the microscope and for optimizing the scanning parameters. The use of these advanced algorithms for a particular type of sample can be designated in the sample information file.
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The traditional atomic force microscope uses a light lever for measuring the force of the probe on the surface. Although the light lever is complex and requires alignment for its operation, there are some advantages. The primary advantage is the ability to do material sensing modes such as lateral force microscopy, phase imaging, and file measurements such as magnetic force microscopy and electrical force microscopy (EFM).
The Nano-R™ stage continues to be compatible with the Light Lever Sensor. Changing between the Light Lever Sensor and the Crystal Sensor takes only a few minutes. Once installed in the Nano-R™ stage, the Light Lever AFM is able to make topography measurements in contact or vibrating modes. With the Light Lever Scanner, the most common mode measurements such as lateral force and vibrating phase are possible.
The Nano-R™ with the Crystal Scanner™ can measure topography images of all types of samples including technical samples and high-resolution imaging of nanostructures. Technical samples include DVD bits, microlens, paper, gratings, and patterned wafers. High-resolution images of nanostructures such as grains, nanoparticles, nanocrystals, and nanotubes are easily taken with the Crystal Scanner™.
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PolySilicon Grains
2 x 2 μ |
Carbon Nanotubes
.75 x .75 μ |
Polished Silicon Wafer
1 x 1 μ |
Sapphire Atomic Terraces
2 x 2 μ |
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Defect on Sapphire Terraces
1 x 1 μ |
Tip Check Sample
2 x 2 μ |
Diffraction Grating
7 x 7 μ |
Magnetic Tape
5 x 5 μ |
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Si Reference
84 x 84 μ |
Paper Folder
19 x 19 μ |
Al Foil
20 x 20 μ |
DVD Replica
2.5 x 2.5 μ |
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Triangle Test Pattern
10 x 10 μ |
Commercial Plastic
32 x 32 μ |
Glossy Cover Paper
24 x 24 μ |
AFM Test Pattern
93 x 93 μ |
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DVD Replica - PMMA
13 x 13 μ |
B Nanowires
17 x 17 μ |
Patterned Wafer
31 x 31 μ |
Patterned Wafer
31 x 31 μ |
Scan Range
X - Y 65 microns
Z 8 microns
Linearity
X - Y - Z < 1%
Cross Talk
X Y < 1%
Z X < 2%
Z Y < 2%
Scanner Bow < +/- 20 nm
Noise** Vertical < 0.1 nm
**Provided site is adequate
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