Litho-Probe Package
 Window in the LPM software Lithography/Manipulation
As seen from the screen shot below almost any type of pattern may be drawn with the LPM software. Once the basic shape is selected, the pattern may be drawn by setting the force of the probe on the sample, set-point. Also, a voltage maybe placed between the probe and the surface. The scan speed in between data points may be selected with the control window.
 This is an example of letters written in a PZT film with the NanoR™ AFM using the LPM software. The letters are less than 100nm in width. The LPM software can be used for several other types of lithography including anodic oxidation, and scratching lithography. Electrical Probing
When the probing icon is selected, the coordinates of the cursor above the sample are displayed. When the mouse is right clicked the I-V measure window appears. The setpoint of the probe on the sample can be selected. For I-V measurements the voltage range and time may be selected. After the parameters for the I/V measurements are selected, the measure window is opened and the data is recorded by selecting the “start” button. After measurement, data is stored in a Microsoft Excel format.  Data is stored in a Microsoft Excel format Other type of Electrical Probing
The LPM software may be easily modified to do testing of many types of electrical materials such as ferroelectric materials. The current meter may be replaced by a capacitance meter for V-C measurments.  With the signal access console, signals such as the AFM sensor displacement may be monitored as a function of voltage.
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