Lithography, Probing, Move-n-scan Software Package

Several advanced functions are possible with the Lithography, Probing, Move-n-Scan software(LPM) software package. This product includes the software and hardware for making the measurements. The advanced functions include:

Modifications: Basic shapes such as lines, dots, and circles as well as images from bitmaps may be written on a surface. The writing technique may be potential, or force driven.

Probing: With the probing option of the LPM software it is possible to place the probe at a specific location on a surface and make an electrical measurement. The initial capability for probing is I/V measurements. However, additional FCE measurements are easily added.

Move n Scan: On the NanoIT and NanoRT AFM systems the several images may be imaged in sequence. The positions for measuring each of the images is selected using a software interface.

Manipulation: Nano-scale objects may be moved across a surface with the AFM probe using the manipulation capability of the LPM software. Examples include moving nano-spheres and nanotubes.

The LPM software window has two primary sections. The move-n-scan section on the left and the lithography-probe section on the right. Each of these sections is described below.

Lithography/Manipulation
As seen from the screen shot below almost any type of pattern may be drawn with the LPM software. Once the basic shape is selected, the pattern may be drawn by setting the force of the probe on the sample, set-point. Also, a voltage maybe placed between the probe and the surface. The scan speed in between data points may be selected with the control window.

Electrical Probing
When the probing icon is selected, the coordinates of the cursor above the sample are displayed. When the mouse is right clicked the I-V measure window appears. The setpoint of the probe on the sample can be selected. For I-V measurements the voltage range and time may be selected.

After the parameters for the I/V measurements are selected, the measure window is opened and the data is recorded by selecting the "start" button. After measurement, data is stored in a Microsoft Excel format.

Other type of Electrical Probing
The LPM software may be easily modified to do testing of many types of electrical materials such as ferroelectric materials. The current meter may be replaced by a capacitance meter for V-C measurments.

With the signal access console, signals such as the AFM sensor displacement may be monitored as a function of voltage.

After selecting the coordinates for imaging with the move-n-scan software, the instrument automatically measures the images in the preselected areas.

With the move-n-scan software it is possible to create extremely large AFM images by measuring several images, in sequence, that are spatially next to each-other. An example of AFM image "stitching" is shown below. The scan size of the "stitched" image is 80 × 220 microns. The image is of a piece of abalone shell, composed of crystalline tiles bonded together with a protein layer. The specimen was mechanically polished before AFM imaging. Optical Image of the sample shows exact location where the sequence of the AFM scans where taken

1.  The NanoRT must be shipped after April 30, 2004 to be compatible with this software package. Systems shipped before this date must be returned to the factory for an electronics upgrade. Contact PNI customer service to arrange for  the electronics upgrade.

2.  Electrical measurements require a current/voltage converter or other type of electrical measuring device.

3.  This software may be used with the Nano-IT; however, no provision is made for electrically isolating the sample on the Nano-IT.

4.  Includes P-020-0007-0 for the NanoRT and the Nano-IT.