The Nano-I™ Atomic Force Microscope
The Nano-I™ (Model #S-030-0000-1) is a complete high performance Atomic Force Microscope system that is optimized for imaging wafers and disks. Applications for the Nano-I™ include research, development, process development and process control. Included with the system are a master computer, software, electronic controller and an AFM stage. The automated X-Y stage accepts wafers up to eight inches in diameter and 0.5 inches thick. With this unique stage, it is possible to adjust the angle of the probe sample under computer control. Nano-I™ software runs on the industry standard Windows XP™ operating system. There are three software modules for acquiring and analyzing AFM images included with the Nano-I™ system:  Nano-I™ Atomic Force Microscope Enlarged EZMode™: For new users or users that want to use the Nano-I™ on an infrequent basis, EZMode™ software is ideal. EZMode™ software guides an operator through the essential steps for acquiring AFM images. X'Pert™: This acquisition software is designed for advanced users that want the flexibility to control all of the parameters in the Nano-I™ stage. Control of each parameter in the stage is available through a series of windows. Nano-Rule™: All of the important features required for rapidly visualizing and analyzing AFM images are included with the Nano-Rule™ software. Additionally, because Nano-Rule™ software was written for Windows XP™, it takes advantage of all the state of the art browsing and report generation features available in the XP environment.
The Nano-I™ Stage
The Nano-I™ stage easily fits on a tabletop and can be operated with high resolution results in a normal laboratory environment. The stage is designed to maximize flexibility in the types of samples that are accommodated as well as make the setup and alignment of the AFM head as easy as possible. The stage includes: - AFM Head
- Sample Stage
- X-Y-Z Sample Stage Translator
- High resolution Video Microscope
All power for the stage is received from the electronic controller via a series of six foot long cables. Operation of the stage requires a high pressure line and a vacuum source. Because the stage is constructed on a solid granite block, Pacific Nanotechnology recommends that two people move the stage. AFM Scanner
The Nano-I™ AFM scanner uses the standard light lever method for monitoring the motion of a cantilever as it is raster scanned across a surface. The scanner is a patented, compact design that offers a direct internal scanner calibration and a hollow pivot scanner that facilitates a direct view with a video microscope. Alignment of the AFM sensor is achieved with four adjustment screws that are easily accessed at the front of the AFM head. Two of the adjustments move the laser onto the cantilever and two of the adjustments move the photo-detector into the path of the reflected laser beam.  Nano-I™ Atomic Force Microscope Scanner Motorized Z Approach
The Nano-I™ includes a unique three motor approach system that is used for moving the AFM probe to the sample for scanning. Each motor has 3/8” of motion, is independently controlled and includes position sensors. The software for activating the Z approach motors is included with the SPMCockpit™ software. Sample Stage All types of wafers and disks are accommodated on the Nano-I™ sample stage. After a wafer is placed on the stage, a vacuum is employed to hold the wafer rigidly to the stage. At the surface of the stage are vacuum rings for 2”, 4”, 6”, and 8” diameter wafers. Each of the vacuum rings may be independently activated. Samples having a thickness of up to 0.5” may be placed on the sample stage for AFM imaging. The sample stage may be rotated by 360° so that an entire wafer can be imaged with the AFM without removing the wafer from the stage. Optional disc holders are available for DVD analysis. X-Y-Z Sample Stage Translation
The Nano-I™ has a unique, patent pending design for the X-Y-Z stage translation mechanism. The X-Y motion is generated by stepper motors at the back of the granite support in a position that is not visible, is easily kept clean and is safe. The stage has a 4” motion in one direction and a 5” motion in the other. Wafers are easily loaded onto the sample stage with software control. Three motors located inside the sample translation block generate the motion of the sample in the Z direction. These three motors are useful not only for probe approach but also for leveling the stage and for precise control of the sample/probe angle. Video Optical Microscope
A color video microscope is essential for locating features on a surface for scanning in an AFM. The Nano-I™ AFM has a motorized zoom and focus video microscope that is controlled by either software or the system’s trackball. There is a manual control of the X-Y position of the microscope objective for centering the image of the cantilever in the video microscope image.  Video optical microscope image of a cantilever in the Nano-I™ Atomic Force Microscope Nano-I™ Controller & Master Computer
Master Computer
The master computer, required for acquiring and analyzing images, is a standard IBM PC type computer. Connection of the computer to the control unit is with a standard Ethernet connector. Specifications for the computer system are improved on a routine basis when improved computer systems are made available.  Nano-I™ Atomic Force Microscope Controller Control Unit
The control unit of the Nano-I™ AFM is based on a PC micro-controller architecture and is connected to the master computer through a standard Ethernet port.
Nano-I™ Software
The Nano-I™ has two primary software modules that are provided with the system: a module for acquiring images and a module for displaying and analyzing images. Additionally, there are advanced modules available as options for displaying and analyzing images, see data sheets P-000-1000-0 and P-000-7331-0. Image Acquisition Software
The Nano-I™ has two types of image capture software; one is for casual or novice users and the other is for advanced users. EZMode™ software is ideal for new Nano-I™ operators or operators that want to use the instrument on an occasional basis. The X'Pert™ software gives powerful control over the Nano-I™ and is designed for advanced AFM users. EZMode™ Software
EZMode™ software is a sequential software package that guides you through the process of acquiring an AFM image. The process oriented software gives a step-by-step procedure for getting an AFM image. At the top of the EZMode™ screen is a list of the steps that must be followed.  EZMode™ Software Interface The following steps are provided in the EZMode™ software. By following these steps it is possible for even the most inexperienced operator to get an AFM image: Assure that a cantilever is in the Microscope. Start: Calibrate Scanner (optional): Select "linearize", then "scanner auto-linearity". - Select Mode: Contact Mode or Vibrating Mode.
- Align Laser: Align the laser onto the cantilever.
- Frequency Sweep: Automatic peak detection for vibrating mode imaging. (only in vibrating mode)
- Stage: Move sample until desired scan area is under cantilever.
- Tip Approach: Activate the motors for approaching the sample with the probe.
- Scanner Sample: Set the scan size and scan parameters.
- Image Processing: Visualize and analyze images.
- Tip Retract: Withdraw tip when scan is complete.
X'Pert™ Software
Direct control of the available feature in an "interactive" mode is possible with the X'Pert™ software. Below is a view of the screen for X'Pert™ software:  X'Pert™ Software Interface The menu items that are available in the X'Pert™ software are: - Setup: This window contains all of the control parameters for operating the microscope including scan ranges, PID settings, etc.
- Tip: The tip button controls all aspects of the tip approach to the sample. The type of approach, rate of approach, and withdrawal are controlled.
- Scanner Control: This window is used while scanning a sample. The window shows between 1 and 4 windows and has the scan size, speed, PID settings, and other scan parameters.
- Force/Distance Window: Complete control of Force/Position curves is possible with the force position curve window.
Image Analysis All of the commonly available image analysis techniques come as standard features with the Nano-I™ AFM system. Functions that are available are: - Histogram Adjust
- Image Level
- 3-D Display
- Line Profile
- Image Correct
Nano-I™ Image Analysis Software Each of the AFM image analysis software features is activated with an icon at the top of the analysis window. Software features include: - Image Leveling: This window permits the removal of sample tilt from images. Removal methods include 3 point plane, polynomial plane fit, and 1D line leveling. User specified areas may be selected and excluded from the leveling process.
- Line Profiles: Several types of line profiles may be selected. They include Horizontal, Vertical, Oblique, Polygonal, Circular, and several line average. Up to four line profiles may be selected for analysis. Horizontal and Vertical distances may be calculated on the line scans.
- Histogram Analysis: The histogram analysis feature is useful for optimizing the display of AFM images. A region of the image histogram may be selected and used for the full pallet range of a displayed image.
- Filtering: Several filtering functions may be applied to an AFM image. Filter options include the blur function, a predetermined filter function, and a conventional kernel. It is possible to select areas of the image that are not included in the filter process.
- Fourier Filtering: A standard FFT function may be applied to an image.
- 3D Imaging: The 3-D imaging feature images may be viewed from several angles and perspectives. Simply dragging the mouse over the image changes the viewing angles.
Specifications for the Nano-I™ AFM
| Stage Specifications: |
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| Size | 16" W × 18.5" H × 25.25" D | | Weight | 170 Lbs | | Cables | 6 Feet | | Power | From Electronic Controller | |
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| AFM Scanner Specifications: |
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| X-Y Scan | Range | 80 µm | | | | Resolution | 2 nm | Calibration Sensor on | | | | 1 nm | Calibration Sensors off | | | Linearity | 1% | Not Rotated | | | | 2% | Rotated | | Z Scan | Range | 8 µm | | | | Z Noise | 0.13 nm | Calibration sensors on | | | | 0.07 nm | Calibration sensors off | | | Sensor Linearity | 100 nm for 80 µm Scan (<0.2%) | | Probe Handling | Pre-mounted cantilevers on steel substrate | | Module Size | 1" H × 4" W × 2.5" D | | Optical View | 90° - 31 mm from top surface to cantilever | 45° |
| Sample Stage Specifications: |
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| Vacuum rings | 2", 4", 6", 8" | | Sample Thickness | 7mm | | Sample Diameter | < 8" with full access
< 12" with partial access | | Attachment | Vacuum |
| Translation Stage Specifications: |
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| X Range | 4" | | Y Range | 5" | | X-Y Step Size | 4 µm | | Z Range | 3/8" | | Z step size | .32 µm | | Angle Adjustment | 5° |
| Video Microscope Specifications: |
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| Magnification | 1000x | Viewed on 9" diag. monitor | | Field of View | 140 µm × 190 µm | FOV with max. zoom | | Resolution | 1.5 µm | | | Motorized Control | Zoom | DC Motor | | Focus | Stepper Motor | | | Zoom | Ratio 4 to1 | | | X-Y Lens Position | 1 mm × 1 mm | Manual control |
| Computer Specifications: |
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| Processor | >1000MHz | | Hard Drive | 20 GB | | CD | 52x | | Memory | 256 Mb | | Operating System | Windows XP™ |
| Controller Physical Specifications: |
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| | Height(in.) | Width(in.) | Depth(in.) | Weight(lbs.) |
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| Electronic Unit | 17 | 15 | 15 | 35 | | Computer | 17 | 8 | 18 | 22 | | Monitor | 18 | 16 | 18 | 30 |
| Control Unit Specifications: |
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| Weight | 65 lbs. | | Voltage | 115/230 VAC, 50/60 Hz | | Current | 0.95/0.45 Amp | | Temperature | 50-95° | | Humidity | 5-60%, non-condensing |
Every effort has been made to ensure the accuracy of the information contained in this brochure. However, technical data and specifications are subject to change without notice as a result of upgrading our products. Therefore, please inquire to verify all critical parameters.
This product is covered by US patents: #5,811,802 and #5,949,070.
DVD Holders for the Nano-I™
The Nano-I™ AFM is designed to hold disks for product development and quality control applications. The standard 200 mm vacuum puck can be replaced with optional vacuum chucks for different types of disks. For DVD analysis there are three disk holders available. The first is for metal stampers, the second is for glass masters, and the third is for holding plastic DVDs. Each of the DVD holders can be rotated 360 degrees.  DVD Stamper Magnetic Chuck for Nano-I™ (Model # P-030-0007-0) A metal DVD stamper is held in place with several magnets that are embedded in the round disk holder. The diameter of the stamper can be from a 50 mm to 200 mm and the thickness is less than 1 mm.  DVD Master Vacuum Chuck for Nano-I™ (Model # P-030-0008-0) The Glass Master Holder supports both 6 mm thick and 10 mm thick 200 mm diameter glass masters. At the edges of the holder are indentations that facilitate placing the glass masters in the Nano-I™ AFM.  Commercial DVD Vacuum Chuck for Nano-I™ (Model # P-030-0006-0) This 200 mm diameter vacuum chuck is designed for holding plastic DVDs. There is a ring cut in the vacuum holder that accommodates the plastic ring at the center of commercial DVDs.
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