The Nano-IT Atomic Force Microscope

The Nano-IT stage easily fits on a tabletop and can be operated with high resolution results in a normal laboratory environment. The stage is designed to maximize flexibility in the types of samples that are accommodated as well as make the setup and alignment of the AFM head as easy as possible. The stage includes:

• AFM Head
• Sample Stage
• X-Y-Z Sample Stage Translator
• High resolution Video Microscope

All power for the stage is received from the electronic controller via a series of six foot long cables. Operation of the stage requires a high pressure line and a vacuum source. Because the stage is constructed on a solid granite block, Pacific Nanotechnology recommends that two people move the stage.

AFM Scanner
The Nano-IT AFM scanner uses the standard light lever method for monitoring the motion of a cantilever as it is raster scanned across a surface. The scanner is a patented, compact design that offers a direct internal scanner calibration and a hollow pivot scanner that facilitates a direct view with a video microscope. Alignment of the AFM sensor is achieved with four adjustment screws that are easily accessed at the front of the AFM head. Two of the adjustments move the laser onto the cantilever and two of the adjustments move the photo-detector into the path of the reflected laser beam.

Motorized Z Approach
The Nano-IT includes a unique three motor approach system that is used for moving the AFM probe to the sample for scanning. Each motor has 3/8" of motion, is independently controlled and includes position sensors. The software for activating the Z approach motors is included with the SPMCockpitT software.

Sample Stage
All types of wafers and disks are accommodated on the Nano-IT sample stage. After a wafer is placed on the stage, a vacuum is employed to hold the wafer rigidly to the stage. At the surface of the stage are vacuum rings for 2", 4", 6", and 8" diameter wafers. Each of the vacuum rings may be independently activated. Samples having a thickness of up to 0.5" may be placed on the sample stage for AFM imaging. The sample stage may be rotated by 360° so that an entire wafer can be imaged with the AFM without removing the wafer from the stage. Optional disc holders are available for DVD analysis.

X-Y-Z Sample Stage Translation
The Nano-IT has a unique, patent pending design for the X-Y-Z stage translation mechanism. The X-Y motion is generated by stepper motors at the back of the granite support in a position that is not visible, is easily kept clean and is safe. The stage has a 4" motion in one direction and a 5" motion in the other. Wafers are easily loaded onto the sample stage with software control. Three motors located inside the sample translation block generate the motion of the sample in the Z direction. These three motors are useful not only for probe approach but also for leveling the stage and for precise control of the sample/probe angle.

Video Optical Microscope
A color video microscope is essential for locating features on a surface for scanning in an AFM. The Nano-IT AFM has a motorized zoom and focus video microscope that is controlled by either software or the system's trackball. There is a manual control of the X-Y position of the microscope objective for centering the image of the cantilever in the video microscope image.