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Nano-IM™ 6x6 AFM |
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Introduction
The Nano-IM™ 6x6 is a complete high performance Atomic Force Microscope system that is optimized for imaging wafers and disks. Applications for the Nano-IM™ 6x6 include research, development, process development and process control.
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Included with the system is a master computer, software, an electronic controller, and an AFM stage. The
automated X-Y stage accepts wafers up to 6” (150 mm) in diameter and 0.33” (8.5 mm) thick. With this
unique stage it is possible to adjust the angle of the probe sample under computer control. Nano-IM™ 6x6
software runs on the Windows XP™ operating system.
The Nano-IM™ 6x6 stage easily fits on a table top
and can be operated with high resolution results in a
normal laboratory environment.
The stage is designed to maximize flexibility in the
types of samples that are accommodated as well as
make the setup and alignment of the AFM head as
easy as possible.
The stage includes:
• AFM Head
• X-Y Sample Stage Translator
• Sample Stage
• Z Motion Control
All power for the stage is received from the electronic controller via a series of 8’ (2.5 m) long cables. Operation of the stage requires an air pressure line and a vacuum source.
AFM Scanner
The Nano-IM™ 6x6 AFM scanner uses the standard light lever method for monitoring the motion of a cantilever as it is raster scanned across a surface. The scanner is a patented, compact design that offers a direct internal scanner calibration. A hollow pivot scanner facilitates a direct view with a video optical microscope.
Alignment of the AFM sensor is achieved with four adjustment
screws that are easily accessed at the front of the AFM head.
Two of the adjustments move the laser into position on the
cantilever. Two other adjustments move the photo-detector into
the path of the reflected laser beam.
Motorized Z Approach
The Nano-IM™ 6x6 includes a unique three motor approach system that is used for moving the AFM probe to the
sample for scanning. Each motor has .33” (8.5 mm) of motion, is independently controlled and includes position
sensors. The software for activating the Z approach motors is included with the SPMCockpit™ software.
Sample Stage
All types of wafers and disks are accommodated on the Nano-IM™ 6x6 sample stage. After a wafer is placed on
the stage, a vacuum is employed to hold the wafer rigidly to the stage. At the surface of the stage are vacuum
rings for 2” (50 mm), 4” (101 mm), and 6” (152 mm) diameter wafers. Each of the vacuum rings may be
independently activated. Samples having a thickness of up to 0.33” (8.5 mm) may be placed on the sample
stage for AFM imaging. The sample stage may be rotated by 360° to image an entire wafer with the AFM
without removing the wafer from the stage.
X-Y-Z Sample Stage Translation
The Nano-IM™ 6x6 has a unique design for the X-Y stage
translation mechanism. The X-Y motion is generated by
stepper motors at the back of the granite support in
a position that is not visible, is easily kept clean, and is
safe.
The stage has a 6” (150 mm) motion in one direction
and a 7” (178 mm) motion in the other. Wafers are
easily loaded on the sample stage with software control.
Motion of the sample in the Z direction is generated
by three motors located inside the gantry. These three
motors are useful not only for probe approach, but also
for leveling the stage and for precise control of the
sample/probe angle.
Software is used for energizing the X-Y sample stage. The window for controlling the stage is illustrated here.
The position and rate of travel are software controlled.
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Video Optical Microscope
A color video microscope is essential for locating
features on a surface for scanning in an AFM. The
Nano-IM™ 6x6 AFM has a motorized zoom and focus
video microscope controlled by either Nano-IM™ 6x6
AFM software or the system’s trackball. There is a
manual control of the X-Y position of the microscope
objective for centering the image of the cantilever in
the video microscope image.
Special Nano-IM™ Configurations
The Nano-IM™ AFM is offered to accomodate scanning
of non-standard sample shapes and sizes. The AFM
scanner is incorporated into a support structure, or
gantry, that may be mounted on a customized stage
so that almost any size and shape of sample may be
scanned successfully.
As an example, Figure 6 illustrates a Nano-IM™
configured for a 12 inch wafer. This stage can also
accomodate samples up to 18 inches in diameter.
Nano-IM™ 6x6 Modes
The Nano-IM™ 6x6 system comes with most standard AFM scanning modes. All are controlled by software
and work on the provided head. The included modes are:
| DC Modes |
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Contact Mode |
Used for basic imaging of a surface |
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Lateral Force Mode |
Image contrast based on surface friction |
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| Vibrating |
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Close-Contact Mode |
Vibrating cantilever with large amplitude |
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Non-Contact Mode |
Vibrating cantilever with small amplitude |
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Material Sensing Mode |
Vibrating cantilever for material contrast |
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| Other |
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Force / Distance Mode |
Force / Distance curves |
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Pulsed Force Mode |
Measures hardness of surface |
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Controller and Master Computer
The master computer, required for acquiring and analyzing
images, is a standard PC type computer. Connection of the
computer to the control unit is with a standard Ethernet
connecter. Specifications for the computer system are
improved on a routine basis when improved computer
systems are made available.
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The control unit of the Nano-IM™ 6x6 AFM is based on
a PC microcontroller architecture and is connected to
the master computer though a standard Ethernet port.
Included with the Nano-IM™ 6x6 is a peripheral control
cabinet that contains the stage control electronics, a
vacuum control system, and a pressure control system.
All of the vacuum and pressure hoses required for the
vacuum chuck are also included with the Nano-IM™ 6x6
AFM.
For a detailed description of the Nano-IM™ 6x6 controller, request data sheet #P-010-0000-1.
Nano-IM™ Software
There are two software modules for acquiring and analyzing AFM images included with the Nano-IM™ 6x6system. Also available as an option is the Nano-Rule+™ analysis software module. All are described below:
EZMode™ Software: For new users or users that want to use the Nano-IM™ 6x6 on an infrequent basis,
EZMode™ software is ideal. EZMode™ software guides an operator through the essential steps for acquiring
AFM images.
X’pert™ Mode Software: This acquisition software is designed for advanced users that want the flexibility to
control all of the parameters in the Nano-IM™ 6x6 stage. Control of each parameter in the stage is available
through a series of windows.
Image Analysis: All of the important features required for rapidly visualizing and analyzing AFM images are
included with the Nano-Rule+™ software. Additionally, because Nano-Rule+™ software was written for
Windows, it takes advantage of all the state of the art browsing and report generation features available in the
Windows environment.
Image Acquisition Software
The Nano-IM™ 6x6 has two types of image capture software; one is for casual or novice users and the other
is for advanced users. EZMode™ software is ideal for new Nano-IM™ 6x6 operators or operators that want
to use the instrument on an occasional basis. The X’pert™ software gives powerful control over the Nano-IM™
6x6 and is designed for advanced AFM users.
EZModeTM Software
EZMode™ software is a sequential software package that guides you through the process of acquiring an AFM
image. The process oriented software gives a step-by-step procedure for getting an AFM image. At the top of
the EZMode™ screen is a sequence of the steps that must be followed.
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- Start: Assure that a cantilever is in the view of the microscope. Place sample in the microscope.
Calibrate scanner.
- Select Mode: Choose contact mode, vibrating mode, or crystal force mode.
- Align Laser: Align the laser on the cantilever.
- Frequency Sweep: Perform automatic peak detection for vibrating mode imaging.
- Stage: Center tip over the area to be scanned.
- Tip Approach: Activate the motors for approaching the sample with the probe.
- Scan Sample: Set the scan size and scan parameters.
- Image Processing: Visualize and analyze images.
- Tip Retract: Move the tip away from the sample surface.
X’pert™ Mode Software
Direct control of the available features in “interactive” mode is possible with the X’pert™ software. Below is a
view of the screen for X’pert™ software . The menu items that are available in the X’pert™ software are:
Oscilloscope Windows
There are five oscilloscope windows for displaying the time variation of a signal, a line, a frequency spectrum, a dual trace scope, and a line scan.
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Image Analysis
All of the commonly available image analysis techniques come as standard features with the Nano-R™ AFM system. Functions that are available are:
• Histogram Analysis
• Plane Correction
• Image Leveling
• Filter
• 3-D Imaging
• Fast Fourier Transform
• Line Profile
Each of the AFM image analysis software features is activated with an icon at the top of the analysis window.
Software Options
In addition to the software modules provided with the Nano-IMTM system, there are several optional software modules including:
• NanoRule+™
• Grain Analysis
• Particle Analysis
• LPM Software
• DVD
Specifications
Light Lever AFM / Scanner
| Force Sensor |
Light Lever |
| Detector |
4 Quadrant Photo-detector |
| Laser |
650 nm diode – 25 micron spot size |
| Laser Adjustment |
80 TPI |
| Probe Holder |
Universal Adapter |
| Probe Types |
Pre-mounted - Magnetic |
| XYZ Calibration Sensors |
Inductive – 1 nm resolution |
| Z Scanner Type |
Piezoelectric Ceramic – Direct |
| Z Range |
8 Microns |
| Z Noise |
<0.06 nm* |
| Z Linearity |
< 1 % |
| Z out of plane motion |
< +/- 30 nm |
| XY Scanner Type |
Flexure |
| XY Range |
90 Microns(180 or 360 microns optional) |
| XY Linearity |
< 1 % |
| XY Noise |
< 0.01 nm (open loop) |
| XY, XZ, YZ Crosstalk |
< 1 % |
| Probe Electrical Connector |
Isolated 5 Connector |
1624 Electronic Control
| Scan DAC |
16 Bits |
XYZ board – Primary and Secondary
• Digital Zoom/Offset
• Analog Zoom
• Z High Voltage
• Z Sample/Hold
• PID Control
• Phase/Amplitude
• XY High Voltage
• XY Sensor Feedback |
16 Bits
4 bits on High Voltage
-20 to 140 Volts
20 Bits
Analog
400 Mhz Clock/32 Bit Frequency Control
+X,-X +Y,-Y (-20 to 140 Volts)
Analog PID Control |
| User Access |
Connector for Signal Access Console |
Internal Digital Control
• CPU
• Operating System
• Communications Protocol
• Memory |
Pentium
Linux
TCP/IP
RAM/Disk Drive |
Motor Driver Board
• Number of Motor Drivers
• Motor Type
• Control
• Additional Function |
7
Stepper
Microprocessor
Light Intensity Control |
Stage
XY Stage Range
• X
• Y |
150 mm
150 mm |
| XY Stage Step Size |
4 um |
| XY Stage Accuracy |
< 10 um |
| Z Motor Range |
8 mm |
| Z Motor Step Size |
162 nm |
Sample Puck
• Hold Down
• Height
• Maximum Sample Diameter |
Magnetic
30 mm
100 mm |
Optical Microscope
• Resolution
• Zoom Ratio
• Field of View |
1.5 u
4:1
140 x 190 u at Maximum Zoom |
| Probe Exchange |
Flip Up |
| Physical Specifications |
| Width |
Depth |
Height |
Weight (kg) |
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• Stage
• Vibration Enclosure
• Electronic Controller
• Work Station |
| 14 |
19 |
16 |
50 |
| 31 |
33 |
56 |
275 |
| 12 |
18 |
22 |
22 |
| 7 |
16 |
16 |
14 |
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Control Station
| Computer Monitor |
19” LCD |
| Video Monitor |
19” LCD |
| Accessories |
Mouse, Keyboard, Trackball |
Computer:
• Type
• Operating System
• Memory
• Disk Drive
AFM Software:
• Acquisition
• Display
Video Converter |
IBM PC
Microsoft Vista
> 1 Gigabyte
> 200 G Bytes
EZ Mode™, X’ert™ Mode
AFM Analysis, and NanoRule+™
NTSC – SVGA |
Sample Stage
| Vacuum Rings |
2” (50.8 mm), 4” (101.59 mm),
6” (152.39 mm) |
| Sample Thickness |
< 0.3” (8 mm) |
| Sample Diameter |
6” (150 mm) full, < 12” (304.8 mm) partial |
| Attachment |
Vacuum |
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