Nano-R™ SPM

Introduction


The Nano-R™ SPM is a powerful, multi-purpose Scanning Probe Microscope (SPM) for making images and measurements of structures with nanometer sized features. Because the Nano-R™ can be used with two versions of image acquisition software, X'pert™ and EZMode™, it is optimized for both novice and expert users. The Nano-R™ can be purchased with the light lever (LL-AFM) or the Crystal Scanner™ (CFM), or both. The Nano-R™ SPM combined with a LL-AFM or CFM includes everything required for AFM imaging; a master computer, a control unit, and the Nano-R™ stage. Also, software for acquiring images as well as displaying and analyzing images is provided with the Nano-R™ SPM. See Figure 1.

Figure1	Figure2

The Nano-R™ SPM stage (shown in Figure 2) is a table top unit and can be operated with high resolution results in a normal laboratory environment. The stage is optimized for rapidly exchanging samples and probes. The sample holder is a versatile design so that many types of samples can be accommodated. Once a sample is placed in the sample holding puck, positioning the probe above the sample is rapidly done with the automated X-Y stage and the high resolution video microscope. The Nano-R™ SPM stage includes a sample puck, X-Y positioning stage, Z motorized approach, and a video optical microscope. All cables are connected at the rear of the stage.


Scanner

The Nano-R™ SPM can be purchased with the LL-AFM scanner, the CFM scanner, or both. The LL-AFM is ideal for visualizing nanostructures and mode measurements. The CFM has Point & Scan™ technology and is ideal for routine topography measurements, and metrology measurements.


Motorized Z Approach

The Nano-R™ includes a unique three motor approach system that is used for moving the AFM probe to the sample for scanning. Each motor has .33" (8.5 mm) of motion, is independently controlled, and includes position sensors. The software for activating the Z approach motors is included with the SPMCockpit™ software.


Sample Holder

The Nano-R™ sample holder facilitates rapid introduction of a sample to the microscope stage. The holder can accommodate a large variety of sample sizes. The standard sample holder is for standard magnetic disks. There are several optional sample holders for the Nano-R™. Additionally, customers can fabricate their own sample "pucks". The maximum sample size that the Nano-R™ stage can hold is 3.5" (88.9 mm) X 3.5" (88.9 mm). Custom sample holders can be easily created for special applications.See Figure 3.


Nano-R™ AFM Stage

Figure3

Automated X-Y Translation Stage

The motorized X-Y positioning stage is used for moving the sample "puck" under the AFM probe. The stage is activated from a window on the master computer or it may be activated from a "track ball". Under computer control, the stage may be moved to specific locations with user defined step sizes. The stage positioning icon is used for "dragging" the stage to a specific location. Software is used for energizing the X-Y sample stage. The window for controlling the stage is illustrated here in Figure 4. The position and rate of travel are software controlled.

Figure 4

Video Optical Microscope

A color video microscope is essential for locating features on a surface for scanning in an AFM. The Nano-R™ AFM has a motorized zoom and focus video microscope that is controlled by either software or the system's trackball. There is a manual control of the X-Y position of the microscope objective for centering the image of the cantilever in the video microscope image. See Figure 5.

Nano-R™ Software

The Nano-R™ has several software modules that are provided with the system. They are:
• EZMode™ -- for beginners and casual users
• X’Pert™ Mode -- for experienced AFM experts
• Image Analysis -- provides basic AFM image display and analysis

Additionally, there are several optional software modules including:
• NanoRule+™
• Grain Analysis
• Particle Analysis
• LPM Software
• DVD


Image Acquisition Software

The Nano-R™ has two types of image capture software; one is for casual or novice users and the other is for advanced users. EZMode™ software is ideal for new Nano-R™ operators or operators that want to use the instrument on an occasional basis. The X'Pert™ software gives powerful control over the Nano-R™ and is designed for advanced AFM users. The following steps are provided in the EZMode™ software.

Image Acquisition Software Menu

EZMode™ Software

EZMode™ software is a sequential software package that guides you through the process of acquiring an AFM image. The process oriented software gives a step-by-step procedure for getting an AFM image. At the top of the EZMode™ screen is a sequence of the steps that must be followed. By following these steps it is possible for even the most inexperienced operator to get an AFM image:

EZMode™ Software Menu

• Assure that a cantilever is in the Microscope.
• Start: Calibrate Scanner (optional): Select "linearize", then "scanner auto-linearity".
• Select Mode: Contact Mode or Vibrating Mode.
• Align Laser: Align the laser onto the cantilever.
• Frequency Sweep: Automatic peak detection for vibrating mode imaging. (only in vibrating mode)
• Stage: Move sample until desired scan area is under cantilever.
• Tip Approach: Activate the motors for approaching the sample with the probe
• Scanner Sample: Set the scan size and scan parameters.
• Image Processing: Visualize and analyze images.
• Tip Retract: Withdraw tip when scan is complete .
  

X’Pert™ Software

Direct control of the available features in "interactive" mode is possible with the X'pert™ software. Below is a view of the screen for X'Pert™ software . The menu items that are available in the X'Pert™ software are::