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The Nano-R2™ system is the second generation of the Nano-R™ laboratory scanning probe microscope (SPM) offered by Pacific Nanotechnology. It is a powerful, multi-purpose SPM for capturing images and measurements of structures with nanometer sized features. Because the Nano-R2™ SFM can be used with two versions of image acquisition software, X’pert™ and EZMode™, it is optimized for both novice and expert users. The Nano-R2™ includes everything required for AFM imaging: a master computer, a control unit, and the Nano-R2™ stage. Also, software for displaying and analyzing images is provided with the Nano-R2™ SPM. See Figure 1.
Advanced features included with the Nano-R2™ are:
• Compatible with light lever and crystal sensors
• Dual 19” LCD monitors
• Advanced 16/32 bit controller architecture
• Enhanced Software functions
• Scanner Auto-Level
• Stage Tilt Function
• Optical Assisted Probe Approach
• Enhanced F/D Software
• T+E Image Enhancement
• Advanced probe approach
• Line scan FFT function
• Optional Particle Analysis substrates
• Real time XY stage control |
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Datasheet Contents
1.0 Stage
1.1 Scanner
1.2 Motorized Z Approach
1.3 Sample Holder
1.4 Automated X-Y stage
1.5 Video Optical Microscope
2.0. Master Computer/Controller
3.0. SPM Cockpit™ Software
3.1 EZMode™
3.2 X’pert™ Mode
3.3 Image Analysis |
1.0 Nano-R2™ SPM Stage
The Nano-R2™ SPM stage, shown in Figure 2, is a
table top unit and can be operated with high resolution results in a normal laboratory environment. The stage
is optimized for rapidly exchanging samples and probes.
An advanced probe exchange mechanism allows
exchanging of probes without removing the scanner
from the stage.
The sample holder is a versatile design so that many
types of samples can be accommodated. Once a
sample is placed in the sample holding puck, positioning
the probe above the sample is rapidly done with the
automated X-Y stage and the high resolution video
microscope. The Nano-R2™ SPM stage includes
a sample puck, X-Y positioning stage, Z motorized
approach, and a video optical microscope. All cables
are connected at the rear of the stage.
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1.1 Scanner
The Nano-R2™ SPM can be purchased with the LL-AFM scanner, the CFM scanner, or both. The LL-AFM is
ideal for visualizing nanostructures and mode measurements. The CFM has Point & Scan™ technology and is
ideal for routine topography measurements, and metrology measurements. See Figures 3A and 3B.
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1.2 Motorized Approach
The Nano-R2™ SPM includes a unique three motor approach system that is used for moving the AFM probe
to the sample for scanning. Each motor has .33” (8.5 mm) of motion, is independently controlled, and includes
position sensors. The software for activating the Z approach motors is included with the SPM Cockpit™
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1.3 Sample Holder
The Nano-R2™ SPM Sample Holder facilitates rapid
introduction of a sample to the microscope stage. The
holder can accommodate a large variety of sample sizes.
The standard sample holder is for standard magnetic
disks. There are several optional sample holders for the
Nano-R2™ SPM. Additionally, customers can fabricate
their own sample “pucks”. The maximum sample size
that the Nano-R2™ SPM stage can hold is 3.5” (88.9
mm) X 3.5” (88.9 mm). Custom sample holders can be
easily created for special applications. See Figure 4.
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1.4 Automated X-Y Translation Stage
The motorized X-Y positioning stage is used for moving
the sample “puck” under the AFM probe. The stage is
activated from a window on the master computer or it
may be activated from a “trackball”. Under computer
control, the stage may be moved to specific locations
with user defined step sizes. The stage positioning icon
is used for “dragging” the stage to a specific location.
Software is used for moving the X-Y sample stage. The
window for controlling the stage is illustrated here in
Figure 5. The position and rate of travel are software
controlled.
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1.5 Video Optical Microscope
A color video microscope is essential for locating
features on a surface for scanning with an SPM. The
Nano-R2™ SPM has a motorized zoom and focus
video microscope (Figure 6) that is controlled by either
software or the system’s trackball. There is a manual
control of the X-Y position of the microscope objective
for centering the image of the cantilever in the video
microscope image.
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2.0 Controller & Master Computer
The master computer, required for acquiring and
analyzing images, uses a state-of-the-art personal
computer. Connection of the computer to the control
unit is accomplished with a standard Ethernet
connector. Specifications for the computer system are
improved on a routine basis when improved computer
systems are made available. The master computer
uses the industry standard WindowsXP™ operating
system.
The control unit of the Nano-R2™ SPM, shown in
Figure 7 is based on a PC 32 bit microcontroller
architecture and is connected to the master computer
though a standard Ethernet port. Control of x-y scanning
is made with 16 bit DAC’s and Z control is provided by
a high fidelity, low noise analog control electronics. |
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3.0 SPM Cockpit™ Software
The Nano-R2™ SPM has several software modules that are provided with the system. SPM Cockpit™ software
operates both the LL-AFM scanner and the crystal scanner. The three modules included with the SPM Cockpit™
Software are:
• EZMode™ -- for beginners and casual users
• X’Pert™ Mode -- for experienced SPM experts
• Image Analysis -- provides SPM image display and analysis |
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For advanced imaging analysis and processing, Pacific Nanotechnology offers NanoRule+™ Software.
Additionally, there are several optional software modules for NanoRule+™ Software including:
• Grain Analysis Model #P-000-1002-0
• Particle Analysis Model #P-000-1003-0
• DVD Analysis Model #X-000-3000-0 |
3.1 EZMode™ Software
EZMode™ software uses a simple sequential routine that guides you through the process of acquiring an
AFM image. EZMode™ software is ideal for new Nano-R2™ SPM operators or operators that want to use the
instrument on an occasional basis. The process-oriented software gives a step-by-step procedure for getting
an AFM image. At the top of the EZMode™ screen is a sequence of the steps that must be followed (Figure 9).
By following these steps it is possible for even the most inexperienced operator to get an AFM image:
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1) Start: |
Assure that a cantilever is in the view of the microscope. Place
sample in the microscope. Calibrate scanner. |
2) Select Mode: |
Choose contact mode, vibrating mode, or crystal force mode. |
3) Align Laser: |
Align the laser on the cantilever. |
4) Frequency Sweep: |
Perform automatic peak detection for vibrating mode imaging. |
5) Stage: |
Center tip over the area to be scanned. |
6) Tip Approach: |
Activate the motors for approaching the sample with the probe. |
7) Scan Sample: |
Set the scan size and scan parameters. |
8) Image Processing:
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Visualize and analyze images. |
9) Tip Retract: |
Move the tip away from the sample su |
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3.2 X’Pert™ Mode Software
Full control of most stage and functions is possible within the X’pert™ software. Figure 11 is a view of the
screen for X’Pert™ software . The menu items that are available in the X’Pert™ software are:
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PhotoDetector Align Window:
This window (Figure 10) facilitates the process of getting the laser aligned on
the back of the cantilever and into the photo-detector. A graphic display shows the position of the laser beam
on the photodetector. Also, there is an indicator for the total light intensity at the photodetector.
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Settings Cards:
All stage and scanner settings
can be changed with this series of display “cards”.
There is a separate “card” for each of the stage/
scanner components that are being controlled.
See Figure 11.
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Oscilloscope Windows:
There are five oscilloscope windows for displaying the time variation of a signal, a line,
a frequency spectrum, a dual trace scope, and a line scan. Two of these are shown in Figures 12 and 13:
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Tip Approach/Retract Window:
The tip button
controls all aspects of the tip approach to the sample.
The type of approach, rate of approach, and withdrawal
are controlled. See Figure 14.
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Scan Control Window:
This window (Figure 15),
displayed while scanning a sample, shows 2 images
and has the scan size, speed, PID setting, and other
scan parameters. All scan parameters such as PID,
pixels, zoom, and rotation angle are controlled with
this window.
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3.2 X’Pert™ Mode Software (Continued)
Force/Distance Curve Window: Complete control
of force/distance curves is possible with the force
distance curve window. See Figure 16.
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3.3 Image Analysis Software
All of the commonly available image processing techniques come as standard features with the Nano-R™ AFM
system.
Functions that are available are:
• Histogram Analysis
• Plane Correction
• Image Leveling
• Filter
• 3-D Imaging
• Fast Fourier Transform
• Line Profile
• Blending of Images
Each of the processing features is activated with an icon at the top of the analysis window.
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Plane Correction:
This window (Figure 17) permits
the removal of sample tilt from images. Leveling
methods include 3 point plane, polynomial plane fit,
and 1D line leveling. User specified areas may be
selected and excluded from the leveling process.
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Line Profile:
Several types of line profiles may be
selected. They include horizontal, vertical, oblique,
polygonal, circular, and several line average. Up to
four line profiles and markers may be selected for
analysis. Horizontal and vertical distances may be
measured on the line scans. See Figure 18.
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Histogram Analysis:
The Histogram Analysis feature,
shown in Figure 19, is useful for optimizing the display
of AFM images. A region of the image histogram may
be selected and used for the full palette range of a
displayed image.
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Filtering:
Several filtering functions may be applied to
an AFM image. Filter options include the blur function,
a predetermined filter function, and a conventional
kernel. It is possible to select areas of the image that
are excluded in the filter process. See Figure 20.
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Fast Fourier Transform:
Choose contact or vibrating
mode to perform a standard Fast Fourier Transform
(FFT) function that may be applied to an image. See
Figure 21.
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3D Imaging:
The 3D imaging features may be viewed
from several angles and perspectives. Viewing angles
are changed by simply dragging the mouse over the
image. See Figure 22.
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Specifications
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