| Input |
Output |
Z(SET)MON1 |
Voltage used for the Z set point is output |
| Z(SIG)MON2 |
Z feedback, may be T-B, phase, amplitude or sensor signal |
| Z(MOD)MON3 |
Z Modulation signal is output |
| Z(DEM)MON4 |
The Z demodulation signal is output |
| Z(ERR)MON5 |
An error signal for the Z feedback loop is output |
| Z(PID)MON6 Z |
Z height signal before 4X gain |
| Z(S)MON7 |
The Z calibration sensor voltage is output |
| Z(HGT)MON8 |
A voltage for the Z piezoelectric ceramic is output |
| Z(L-R)MON9 |
Photo-detector: Left minus Right signal |
| Z(T-B)MON10 |
Photo-detector : Top minus bottom signal |
X(DAC)MON11 |
The X piezoelectric drive signal |
| Y(DAC)MON12 |
The Y piezoelectric drive signal |
| X(SET)MON13 |
Set-point for feedback control in X axis |
| Y(SET)MON14 |
Set-point for feedback control in Y axis |
| X(SEN)MON15 |
The X calibration sensor voltage output |
| Y(SEN)MON16 |
The Y calibration sensor voltage output |
X(CTL)MON17 |
Output to the X axis before the high voltage amplifier |
Y(CTL)MON18 |
Output to the Y axis before the high voltage amplifier |
Z(PIZ)MON19 |
Monitor of voltage to the Z piezoelectric ceramic |
Z(SUM)MON20 |
Sum of the voltages from the four quadrant photo-detector |
AUX 1 + |
Differential input for auxiliary input ADC 1 |
AUX 1 -
|
Differential input for auxiliary input ADC 1 |
AUX 2 +
|
Differential input for auxiliary input ADC 2 AUX 2 -Differential input for auxiliary
input ADC 1 AUX1-DAC 13 bit bipolar DAC, -10 VDC to + 10 VDC output AUX2-
DAC 8 bit DAC, 0 VDC to + 10 VDC output EXT + Differential input for Z PID loop |
| EXT - |
Differential input for Z PID loop |
| +5V REFB |
Five volt reference(X2) |
| ADC- 8B |
Non-buffered auxiliary input |
| FLGSS |
Start scan flag |
| EXT-MOD |
External modulation input for Z piezo |
| EXTSS |
Input signal to start a scan |
| FLAGPT |
Flag set and clear for each data point in a scan |
