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Guide to AFM standards and references
Introduction
Z Calibration
XY Linearity/Calibration/Orthogonality
XZ, YZ Orthogonality
Flatness/Roughness
Particles
Bio-Molecules
Friction mode
Vibrating Phase Mode
Tip Visualization
Conclusion
All sections (one page version)
Friction mode
LFM reference comes as 1-D array of triangular steps having precise linear and angular dimensions. Establishing quantitative LFM data requires standardizing the AFM scanner output in the vertical and horizontal axis.
Company
Standard/Reference
MicroMasch
Pitch = 3.0µm ± 5nm
Edge curvature < 10nm
Top angle = 70deg
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