Pacific Nanotechnology Inc.
Guide to AFM standards and references
Friction mode
LFM reference comes as 1-D array of triangular steps having precise linear and angular dimensions. Establishing quantitative LFM data requires standardizing the AFM scanner output in the vertical and horizontal axis.
| Company |
Standard/Reference |
| MicroMasch |
Pitch = 3.0µm ± 5nm Edge curvature < 10nm Top angle = 70deg |