Pacific Nanotechnology Inc.

Guide to AFM standards and references

Friction mode

LFM reference comes as 1-D array of triangular steps having precise linear and angular dimensions. Establishing quantitative LFM data requires standardizing the AFM scanner output in the vertical and horizontal axis.

Company Standard/Reference
MicroMasch Pitch = 3.0µm ± 5nm
Edge curvature < 10nm
Top angle = 70deg