XY Linearity/Calibration/Orthogonality
Calibration of the AFM in the XY axis so that meaningful dimension measurements can be made requires establishing the linearity and orthoganality of the AFM scanner. This is typically done with etched patterns in quartz or silicon. Often the spedicimen that is used for calibrating the Z axis can be used for the XY axis as well.
| Company |
Standard/Reference |
| VLSI Standards |
StandardsZ = 18nm, 44nm, 100nm, 180nm
Pitch = 1.8µm, 3µm, 5µm, 10µm, 20µmReferences:Z = 18nm, 44nm, 100nm, 180nm
Pitch = 3µm, 10µm |
| MicroMasch |
Pitch = 3µm, 10µm
Z ~1µm, 2µm |
| PacificNanotechnology |
Pitch = 20µm, 10µm, 5µm, 3µm
Z ~75nm |
|
