Pacific Nanotechnology Inc.

Guide to AFM standards and references

XY Linearity/Calibration/Orthogonality

Calibration of the AFM in the XY axis so that meaningful dimension measurements can be made requires establishing the linearity and orthoganality of the AFM scanner. This is typically done with etched patterns in quartz or silicon. Often the spedicimen that is used for calibrating the Z axis can be used for the XY axis as well.

Company	Standard/Reference
VLSI Standards	StandardsZ = 18nm, 44nm, 100nm, 180nm Pitch = 1.8µm, 3µm, 5µm, 10µm, 20µmReferences:Z = 18nm, 44nm, 100nm, 180nm Pitch = 3µm, 10µm
MicroMasch	Pitch = 3µm, 10µm Z ~1µm, 2µm
PacificNanotechnology	Pitch = 20µm, 10µm, 5µm, 3µm Z ~75nm